论文标题
SRTIO3复合氧化物表中压力层诱导的弹性应变共享
Stressor-Layer-Induced Elastic Strain Sharing in SrTiO3 Complex Oxide Sheets
论文作者
论文摘要
精确选择的弹性应变可以使用氮化硅应激层中的亚厚单晶SRTIO3板中引入。使用等离子体增强化学蒸气沉积沉积的保形应激层在薄板中产生弹性应变，与氮化物残留应力的大小一致。 Synchrotron X射线纳米式曲线表明，SRTIO3板中引入的应变为10 4，与弹性模型的预测匹配。这种在复杂氧化物中弹性应变共享的方法可以在较宽且连续的值范围内选择菌株，这在刚性底物上无法实现的效果。
A precisely selected elastic strain can be introduced in submicron-thick single-crystal SrTiO3 sheets using a silicon nitride stressor layer. A conformal stressor layer deposited using plasma-enhanced chemical vapor deposition produces an elastic strain in the sheet consistent with the magnitude of the nitride residual stress. Synchrotron x-ray nanodiffraction reveals that the strain introduced in the SrTiO3 sheets is on the order of 10 4, matching the predictions of an elastic model. This approach to elastic strain sharing in complex oxides allows the strain to be selected within a wide and continuous range of values, an effect not achievable in heteroepitaxy on rigid substrates.
