论文标题
在大气压力下的感应耦合等离子体，这是微型设备的挑战
Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
论文作者
论文摘要
等离子体喷射属于类别远程等离子体。这意味着可以单独调整放电条件和对样品的化学作用，这是与标准低压反应器相比的一个很大的优势。电感耦合带来了纯净和致密的等离子体的优势。微波激发允许小型化和低温等离子体的产生。本文显示了有关此类资源的研究的现状，证明了它们的工作达到大气压力。
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The present paper shows the state of the art of the research on such sources, demonstrating their work up to atmospheric pressure.
