论文标题
用压电铝层的硅纳米弦的高频机械激发
High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers
论文作者
论文摘要
基于量子的技术和应用的强烈趋势遵循结合不同平台以利用其互补技术和功能优势的途径。由于多尺度及其与电子和光子的普遍耦合，微型机械设备和纳米机械设备特别适合混合整合。在这里，我们报告了纳米力学技术平台，其中硅芯片与氮化铝层结合使用。利用ALN压电性，将表面声波注入了Si层中，该材料已被局部图案化并蚀刻形成悬浮的纳米串。表征由SAW诱导的纳米串垂直位移，我们在1 GHz机械频率下发现了超过500 pm/v的外部激发峰效率。我们的技术平台利用了硅光子和电子设备的长期专业知识以及锯稳健性和多功能性，代表了混合量子系统的强大候选者。
A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Micro and nano-mechanical devices are particularly suitable for hybrid integration due to the easiness of fabrication at multi-scales and their pervasive coupling with electrons and photons. Here, we report on a nanomechanical technological platform where a silicon chip is combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity, Surface Acoustic Waves are injected in the Si layer where the material has been localy patterned and etched to form a suspended nanostring. Characterizing the nanostring vertical displacement induced by the SAW, we found an external excitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency. Exploiting the long term expertise in silicon photonic and electronic devices as well as the SAW robustness and versatility, our technological platform represents a strong candidate for hybrid quantum systems.
