论文标题
用石墨烯膜对两个机械谐振器的可调耦合
Tunable coupling of two mechanical resonators by a graphene membrane
论文作者
论文摘要
耦合的纳米力学谐振器对于基本研究和实际应用都很有趣，因为它们提供了丰富而可调的振荡动力。目前，这种系统中的机械耦合通常是由固定几何形状（例如谐振器的关节夹点或位移依赖性力）介导的。在这里，我们显示了一个由两个物理分离的机械谐振器组成的石墨烯集成机电系统 - 梳子驱动执行器和一个悬浮的硅束 - 它们与石墨烯膜相结合。此外，石墨烯膜为两个共振系统硅结构提供了敏感的电读数，显示了0.4〜至24〜MHz的频率范围内的16个不同模式。此外，通过将用静电电势涂在硅谐振器之一上的石墨烯膜上，我们可以控制由$ g $ - factor量化的机械耦合，从20 kHz到100 kHz。我们的结果为耦合的纳米机电系统铺平了道路，需要机械耦合的谐振器。
Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we show a graphene-integrated electromechanical system consisting of two physically separated mechanical resonators -- a comb-drive actuator and a suspended silicon beam -- that are tunably coupled by a graphene membrane. The graphene membrane, moreover, provides a sensitive electrical read-out for the two resonating systems silicon structures showing 16 different modes in the frequency range from 0.4~to 24~MHz. In addition, by pulling on the graphene membrane with an electrostatic potential applied to one of the silicon resonators, we control the mechanical coupling, quantified by the $g$-factor, from 20 kHz to 100 kHz. Our results pave the way for coupled nanoelectromechanical systems requiring controllable mechanically coupled resonators.
