论文标题

高度准确测定异质堆叠的vander-waals材料通过光学微光镜检查

Highly Accurate Determination of Heterogeneously Stacked Van-der-Waals Materials by Optical Microspectroscopy

论文作者

Hutzler, Andreas, Fritsch, Birk, Matthus, Christian D., Jank, Michael P. M., Rommel, Mathias

论文摘要

使用光学微镜检查获得的数据的混合评估方案最终确定了Van-Waals异质结构的组成。该方案部署了一个参数集,其中包括反射光谱中不同极端值的反射率变化和波长变化。此外,该方法得到了一种精确的分析模型的支持,该模型描述了光学微光谱获得的多层系统的反射率。这种方法可以独特地歧视2D材料,例如石墨烯和HBN,因此可以对含有结构非常相似材料的Van-Waals异质结构进行定量分析。物理模型具有传输矩阵方法,该方法允许对复杂的光学系统的灵活,模块化描述,并且很容易扩展到单个设置。它说明了应用物镜的数值孔和一个玻璃纤维,该玻璃纤维通过两个单独的加权功能将光引导到光谱仪中。该方案通过高度准确地量化了Van-Waals异质结构中石墨烯和HBN层的数量。在这种示例性的情况下,石墨烯的指纹涉及反射率的不同偏差,并伴随着极值的其他波长移动。与石墨烯相反,HBN的指纹揭示了绝对反射率的偏差可忽略不计,导致该材料仅通过极端值的光谱移动才能检测到这种材料。

The composition of Van-der-Waals heterostructures is conclusively determined using a hybrid evaluation scheme of data acquired by optical microspectroscopy. This scheme deploys a parameter set comprising both change in reflectance and wavelength shift of distinct extreme values in reflectance spectra. Furthermore, the method is supported by an accurate analytical model describing reflectance of multilayer systems acquired by optical microspectroscopy. This approach allows uniquely for discrimination of 2D materials like graphene and hBN and, thus, quantitative analysis of Van-der-Waals heterostructures containing structurally very similar materials. The physical model features a transfer matrix method which allows for flexible, modular description of complex optical systems and may easily be extended to individual setups. It accounts for numerical apertures of applied objective lenses and a glass fiber which guides the light into the spectrometer by two individual weighting functions. The scheme is proven by highly accurate quantification of the number of layers of graphene and hBN in Van-der-Waals heterostructures. In this exemplary case, the fingerprint of graphene involves distinct deviations of reflectance accompanied by additional wavelength shifts of extreme values. In contrast to graphene the fingerprint of hBN reveals a negligible deviation in absolute reflectance causing this material being only detectable by spectral shifts of extreme values.

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