论文标题
用低温冷却的超高vacuum旋转样品操纵器
An Ultra-High-Vacuum Rotating Sample Manipulator with Cryogenic Cooling
论文作者
论文摘要
我们报告了一个用低温冷却的自制的超高vacuum（UHV）旋转样品操纵器。样品支架通过柔性铜颗粒条将样品持有人热锚定在内置的低温冷头上，从而可以连续样品旋转。针对样品支架的电线实现了类似的接触机制以进行温度计。因此，该设备可以在UHV环境中在调节的低温温度下进行连续样品旋转。我们讨论了该设备在低温溅射中的潜在应用。
We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for the electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss the potential applications of this apparatus for cryogenic sputtering.
