论文标题

用于扫描透射电子显微镜数据的单次投影三维重建算法

A single-projection three-dimensional reconstruction algorithm for scanning transmission electron microscopy data

论文作者

Brown, Hamish G., Pelz, Philipp M., Hsu, Shang-Lin, Zhang, Zimeng, Ramesh, Ramamoorthy, Inzani, Katherine, Sheridan, Evan, Griffin, Sinéad M., Schloz, Marcel, Pekin, Thomas C., Koch, Christoph T., Findlay, Scott D., Allen, Leslie J., Scott, Mary C., Ophus, Colin, Ciston, Jim

论文摘要

对三维纳米结构的兴趣不断提高,为能够在三个维度下在纳米级以下成像或下方成像的电子显微镜技术增加了动力。我们提出了一种重建算法,该算法将其作为输入焦点系列的四维扫描传输电子显微镜(4D-STEM)数据。我们将方法应用于铅启动,pb $ _2 $ ir $ _2 $ o $ $ _7 $和yttrium稳定的氧化锆,y $ _ {0.095} $ zr $ _ {0.905} $ o $ $ $ $ $ $ _2 $,与单个平面图中的杂物相同,将单个层次的数据与单个平面图相同,并将单个平面图组合在一起。 方向。我们证明了PB-IR原子柱在重建体积的最上层中可见。我们将这种方法与使用差分相比扫描透射电子显微镜(DPC-STEM)和Multislice Ptychographic重建的替代技术进行了比较。

Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data. We apply the approach to a lead iridate, Pb$_2$Ir$_2$O$_7$, and yttrium-stabilized zirconia,Y$_{0.095}$Zr$_{0.905}$O$_2$ , heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction. We demonstrate that Pb-Ir atomic columns are visible in the uppermost layers of the reconstructed volume. We compare this approach to the alternative techniques of depth sectioning using differential phase contrast scanning transmission electron microscopy (DPC-STEM) and multislice ptychographic reconstruction.

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