论文标题

自动反应性离子自由蚀刻的无纤维耦合到纳米光子设备

Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

论文作者

Flassig, Fabian, Flaschmann, Rasmus, Kainz, Thomas, Ernst, Sven, Strohauer, Stefan, Schmid, Christian, Zugliani, Lucio, Müller, Kai, Finley, Jonathan J.

论文摘要

集成的光电设备和量子光子体系结构的快速开发使光纤需要以低损失的形式进行芯片耦合。在这里,我们提出了一种快速且通用的方法,该方法允许温度稳定的纳米光仪设备与光纤连接。我们表明,我们的方法的可实现精度等于基于DRIE的耦合。具体而言,初始对齐精度为$ 1.2 \ pm0.4μm$,这是由交配$ <0.5μm$引起的平均偏移,这是按照所采用光纤同心的精确度,热循环稳定性为$ <0.2μm$。从这些值中,预期的总比对偏移计算为$ 1.4 \ pm0.4μm$。这些结果表明,我们的过程提供了一种易于实现的,多功能,健壮和DRIE的方法,可将光子设备耦合到光纤。它可以完全自动化,因此可扩展到与量子光子系统的新型设备耦合。

Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based couplings. Specifically, the initial alignment precision is $1.2\pm 0.4μm$, the average shift caused by mating $<0.5μm$, which is in the order of the precision of the concentricity of the employed fiber, and the thermal cycling stability is $<0.2μm$. From these values the expected overall alignment offset is calculated as $1.4 \pm 0.4μm$. These results show that our process offers an easy to implement, versatile, robust and DRIE-free method for coupling photonic devices to optical fibers. It can be fully automated and is therefore scalable for coupling to novel devices for quantum photonic systems.

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