论文标题
基于ALN MF-PMUT的光声成像，带宽宽
Photoacoustic Imaging Based on AlN MF-PMUT with Broadened Bandwidth
论文作者
论文摘要
本文报告了用于光声成像（PA）成像的氮化铝（ALN）多频压电微机械超声传感器（MF-PMUT）阵列，其中宽扩大的带宽有益于改善成像分辨率。具体而言，由于其微型尺寸，基于微电机电系统（MEMS）技术的PMUT适用于血管和支气管的PA内镜成像。更重要的是，ALN是一种无毒的材料，它对生物医学应用无害。在这项工作中，为PAI设计和制造了MF-PMUT阵列。分析了设备的振动模式阻抗和带宽。 MF-PMUT传感器可提供更宽的带宽（65％）信号检测，这与传统PMUT相比增加了PAI的分辨率。我们对琼脂样品进行了实验，以介绍传感器在图像的轴向分辨率中的性能。
This paper reports an aluminum nitride (AlN) multi-frequency piezoelectric micromachined ultrasound transducers (MF-PMUT) array for photoacoustic (PA) imaging, where the broadened bandwidth is beneficial to improve imaging resolution. Specifically, PMUT based on micro-electromechanical systems (MEMS) technology is suitable for PA endoscopic imaging of blood vessels and bronchi due to its miniature size. More importantly, AlN is a non-toxic material, which makes it harmless for biomedical applications. In this work, a MF-PMUT array are designed and fabricated for PAI. The device's vibration mode impedance and bandwidth are analyzed. The MF-PMUT sensor provides a wider bandwidth (65%) signal detection, which increases the resolution of PAI compared with traditional PMUT. We conduct an experiment on agar sample to present sensor's performance in images' axial resolution.
