论文标题

基于氮化硅的可扩展开关平板耦合器的光学分阶段阵列

Scalable switched slab coupler based optical phased array on silicon nitride

论文作者

Muñoz, Pascual, Pastor, Daniel, Bru, Luis A., Micó, Gloria, Benítez, Jesús, Goodwill, Dominic J., Bernier, Eric

论文摘要

通过使用与FMCW LIDAR兼容的多输入星形耦合器,可以证明一个二维光学阵列。使用单输入设计的先前方法通过依靠可调激光源来实现二维梁的探测,利用光栅耦合器辐射角波长依赖性和波导折射率的变化。在实施一种方便的方式以单步分发功率时,星际耦合器体系结构在使用的波导长度方面效率低下,因此,光损失和足迹。多输入方法通过将多个单输入设备凝结成一个,可以部分缓解这种方法,从而允许与所使用的输入数量成比例地减少足迹。我们在硝酸硅技术中制造了一项概念验证验证者,横梁腰部0.36度x 0.175摄入15度x 2.8度的视野。还报告了一种新的设计迭代,并有0.24摄氏度x 0.16度梁腰和15度x 11.2度的视野。还提出了这种基于光学的阵列芯片的含义。

A two-dimensional optical-phased array is demonstrated by using a multiple-input star coupler, compatible with FMCW LiDAR. Previous approach using a single-input design achieves two-dimensional beam-steering by relying on a tunable laser source, taking advantage of grating coupler radiation angle wavelength dependance and variation of the waveguide refractive index. While implementing a convenient way to distribute power in a single step, star coupler architecture is inefficient in terms of employed waveguide length and thus, optical loss and footprint. Multi-input approach partially alleviates this by condensing several single-input devices into one, permitting to reduce the footprint proportionally to the employed number of inputs. We fabricated in silicon nitride technology a proof of concept steerer with beam waist 0.36 deg x 0.175 deg addressing a field of view of 15 deg x 2.8 deg. A new design iteration is also reported with and 0.24 deg x 0.16 deg beam waist and 15 deg x 11.2 deg field of view. Implications of this optical-phased array chips from a LiDAR system perspective are also presented.

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