论文标题
在电容耦合等离子体的欧姆主导加热模式下，边界电子发射倒置
On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission
论文作者
论文摘要
从边界发射的电子发射在电容性耦合血浆（CCP）中无处不在，并沉淀出对排放特性的不可忽略的影响。在这里，我们介绍了电容性耦合等离子体的欧姆义优势加热模式的PIC-MCC模拟，随机加热消失，只有欧姆加热才能维持放电，这是由于边界电子发射的鞘反转而导致的。倒置的CCP具有无玻璃纤维预兆的负鞘电势，因此不包括由于鞘缘振荡而引起的血浆加热。分析了提出的加热模式的粒子和能量传输。边界电子发射通量，源电压和中性压力对经典和欧姆式CCP加热模式之间的过渡的影响显示了指定的模拟扫描。发现了由于过度电离而导致的经过修改的逆鞘等耦合。最后，为将来的实验验证提供了在血浆诊断中提出的加热模式的关键指标。
Electron emission from the boundary is ubiquitous in capacitively coupled plasma (CCP) and precipitates nonnegligible influences on the discharge properties. Here we present the PIC-MCC simulation of an Ohmic-dominant heating mode of capacitively coupled plasma where the stochastic heating vanishes and only Ohmic heating sustains the discharge, due to sheath inversion by boundary electron emission. The inverted CCP features negative sheath potential without Bohm presheath, hence excluding plasma heating due to sheath edge oscillation. The particle and energy transport of the proposed heating mode is analyzed. The influences of boundary electron emission flux, source voltage, and neutral pressure on the transition between classic and Ohmic-dominant CCP heating modes are shown with designated simulation scans. A modified inverse sheath-plasma coupling due to excessive ionization is discovered. In the end, key indicators of the proposed heating mode in plasma diagnostics are provided for future experimental verifications.
