论文标题
从si纳米线到ge纳米晶体,用于Vis-nir-Swir传感器和非挥发性记忆:评论
From Si Nanowires to Ge Nanocrystals for VIS-NIR-SWIR Sensors and Non-volatile Memories: A Review
论文作者
论文摘要
对于与光发射,光传感器,光电探测器,太阳能收集和转换设备相关的集成SI光子学以及浮动门非挥发性记忆(NVM),纳米晶Si和GE具有很高的兴趣。在这篇综述中,我们专注于纳米晶多孔SI(NC-PS),并将其扩展到Si Nanodots,以及GE纳米晶体(NCS)/量子点(QDS)/纳米颗粒(NPS)(NPS)(NPS)(NPS)嵌入了氧化物(Sio $ _2 $ _2 $ _2 $ _2 $ _2 $ _2 $,HFO $ o $ o o o o o o o o)。 NC-PS的最大资产是在室温下(RT)的VIS中强烈的光致发光,而嵌入氧化物中的GE NCS/NPS在频谱光电流中显示出较高的光敏性,最高为1325 nm。 GE NCS/NPS/QD浮动门NVM呈现高内存性能,与NCS Floing Gate NVM的最新水平相对应的保留特性。我们证明了控制具有靶向光致发光,光敏性和电荷存储特性的膜的制备参数的相关性,例如Vis-nir-SWIR光学传感器和光电视,以及电子和光电NVM。我们证明了制备条件,形态,组成和结构结构与光学,电气,光电和电荷存储特性的相关性,并证明了量子限制效应,局部状态和捕获中心的贡献。
Nanocrystalline Si and Ge are of high interest for integrated Si photonics related to light emission, optical sensors, photodetectors, solar energy harvesting and conversion devices, and also for floating gate non-volatile memories (NVMs). In this review, we have focused on nanocrystalline porous Si (nc-PS) with extension to Si nanodots, and Ge nanocrystals (NCs)/quantum dots (QDs)/nanoparticles (NPs) embedded in oxides (SiO$_2$, TiO$_2$, HfO$_2$, Al$_2$O$_3$). The great asset of nc-PS is its intense photoluminescence in VIS at room temperature (RT), while Ge NCs/NPs embedded in oxides show high photosensitivity in VIS-NIR-SWIR in the spectral photocurrent up to 1325 nm at RT. Ge NCs/NPs/QDs floating gate NVMs present high memory performance, the retention characteristics corresponding to the state of the art for NCs floating gate NVMs. We prove the relevance of controlling the preparation parameters for obtaining films with targeted photoluminescence, photosensitivity and charge storage properties for applications, e.g. VIS-NIR-SWIR optical sensors and photodetectors, and electronic and photoelectric NVMs. We evidence the correlation of preparation conditions, morphology, composition and crystalline structure with optical, electrical, photoelectrical and charge storage properties and also evidence the contribution of quantum confinement effect, localized states and trapping centers.