论文标题

由于掺杂硅的量子限制而导致的中红外等离子体共振

Suppression of mid-infrared plasma resonance due to quantum confinement in delta-doped silicon

论文作者

Young, Steve M., Katzenmeyer, Aaron M., Anderson, Evan M., Luk, Ting S., Ivie, Jeffrey A., Schmucker, Scott W., Gao, Xujiao, Misra, Shashank

论文摘要

经典的DRUDE模型提供了三维材料的等离子体共振的准确描述,但仅部分解释了二维系统,其中量子机械效应占主导地位,例如P:$δ$ - 层 - 原子上稀薄的磷掺杂剂的硅掺杂剂,在传统的掺杂层中诱导新型电子性能。以前表明,p:$δ$ - 层在椭圆测量中产生独特的drude尾部特征。但是,通过将$δ$层建模为经典Drude金属的离散层,无法正确拟合椭圆测量光谱。特别是,即使对于对应于极短的松弛时间的大扩展,也可以预期血浆共振功能,但在实验数据中也不明显。在这项工作中,我们对该系统进行了物理上准确的描述,该描述揭示了一种具有有意抑制血浆共振的薄膜的一般方法。我们的模型考虑了P:$δ$ -Layer的强电荷密度约束和由此产生的量子机械描述。我们表明,缺乏血浆共振特征是由于两个因素的组合而产生的:i),由于生长方向的强限制,电荷密度较大; ii),由于山谷退化而导致的有效质量和松弛时间各向异性。当允许组成$δ$层的原子从层平面中扩散出来时,等离子体共振会重新出现,从而破坏其固定良好的二维特征,这对于其新型电子性质至关重要。

The classical Drude model provides an accurate description of the plasma resonance of three-dimensional materials, but only partially explains two-dimensional systems where quantum mechanical effects dominate such as P:$δ$-layers - atomically thin sheets of phosphorus dopants in silicon that induce novel electronic properties beyond traditional doping. Previously it was shown that P:$δ$-layers produce a distinct Drude tail feature in ellipsometry measurements. However, the ellipsometric spectra could not be properly fit by modeling the $δ$-layer as discrete layer of classical Drude metal. In particular, even for large broadening corresponding to extremely short relaxation times, a plasma resonance feature was anticipated but not evident in the experimental data. In this work, we develop a physically accurate description of this system, which reveals a general approach to designing thin films with intentionally suppressed plasma resonances. Our model takes into account the strong charge density confinement and resulting quantum mechanical description of a P:$δ$-layer. We show that the absence of a plasma resonance feature results from a combination of two factors: i), the sharply varying charge density profile due to strong confinement in the direction of growth; and ii), the effective mass and relaxation time anisotropy due to valley degeneracy. The plasma resonance reappears when the atoms composing the $δ$-layer are allowed to diffuse out from the plane of the layer, destroying its well-confined two-dimensional character that is critical to its novel electronic properties.

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