ICS31.260 CCSL51 团体标准 T/JGXH005—2020 超快激光精密微纳加工设备 Ultrafastlaserprecisionmicro&nanomachiningequipment 2020-12-30发布 2020-12-31实施 武 汉 激 光 学 会 武汉·中国光谷激光加工产业技术创新战略联盟发布 全国团体标准信息平台 全国团体标准信息平台 T/JGXH005—2020 I目次 前言.........................................................................................................................................................................Ⅱ 1范围...................................................................................................................................................................1 2规范性引用文件...............................................................................................................................................1 3术语和定义.......................................................................................................................................................1 4主要技术参数...................................................................................................................................................1 5技术要求...........................................................................................................................................................2 5.1使用条件....................................................................................................................................................2 5.2加工质量....................................................................................................................................................2 5.3装配质量....................................................................................................................................................2 5.4外观质量....................................................................................................................................................2 5.5其他部件....................................................................................................................................................2 5.6主要参数....................................................................................................................................................3 5.7冷却系统....................................................................................................................................................3 5.8运动控制系统............................................................................................................................................3 6安全与防护.......................................................................................................................................................3 7几何精度检验...................................................................................................................................................4 8检验方法...........................................................................................................................................................6 9检验规则...........................................................................................................................................................6 9.1检验分类....................................................................................................................................................6 9.2检验项目....................................................................................................................................................6 9.3出厂规则....................................................................................................................................................6 9.4型式检验....................................................................................................................................................6 10标志、包装、运输与贮存.............................................................................................................................6 10.1标志..........................................................................................................................................................6 10.2包